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ULSI-device characterization using nano-SRP

dc.contributor.authorDe Wolf, Peter
dc.contributor.authorTrenkler, Thomas
dc.contributor.authorClarysse, Trudo
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorHellemans, L.
dc.date.accessioned2021-09-30T08:09:00Z
dc.date.available2021-09-30T08:09:00Z
dc.date.issued1997
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1834
dc.sourceIIOimport
dc.titleULSI-device characterization using nano-SRP
dc.typeProceedings paper
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewno
dc.source.beginpage92
dc.source.endpage101
dc.source.conferenceProceedings of Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices ; 6-8 May 1997
dc.source.conferencelocation
imec.availabilityPublished - imec


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