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Design and application of a sensor to monitor stress in deep submicron copper interconnects
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Authors
Wilson, Chris
;
Croes, Kristof
;
Tokei, Zsolt
;
Beyer, Gerald
;
Horsfall, A.
;
Neill, A.
Conference
Stress-Induced Phenomena in Metallization: 11th International Workshop
Title
Design and application of a sensor to monitor stress in deep submicron copper interconnects
Publication type
Proceedings paper
Embargo date
9999-12-31
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