Authors

Wilson, Chris; Oila, A.; Sanderson, L.; Bull, S.; Raskin, Jean-Pierre; Croes, Kristof; Horsfall, A.; O'Neill, A.; Tokei, Zsolt; Beyer, Gerald

Conference

11th International Workshop on Stress-Induced Phenomena in Metallization

Title

Simulation of the effect of microstructure on the elastic properties of copper interconnects

Publication type

Oral presentation