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11-Megapixel CMOS-integrated SiGe micromirror arrays for high-end applications

dc.contributor.authorWitvrouw, Ann
dc.contributor.authorHaspeslagh, Luc
dc.contributor.authorVarela Pedreira, Olalla
dc.contributor.authorDe Coster, Jeroen
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorTilmans, Harrie
dc.contributor.authorBearda, Twan
dc.contributor.authorSchlatmann, Bart
dc.contributor.authorvan Bommel, Mark
dc.contributor.authorde Nooijer, Christine
dc.contributor.authorMagnee, P.H.C.
dc.contributor.authorLous, E.J.
dc.contributor.authorHagting, Marco
dc.contributor.authorLauria, John
dc.contributor.authorVanneer, Roel
dc.contributor.authorvan Drieenhuizen, Bert
dc.date.accessioned2021-10-19T00:32:25Z
dc.date.available2021-10-19T00:32:25Z
dc.date.issued2010
dc.identifier.issn1057-7157
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18362
dc.sourceIIOimport
dc.title11-Megapixel CMOS-integrated SiGe micromirror arrays for high-end applications
dc.typeJournal article
dc.contributor.imecauthorHaspeslagh, Luc
dc.contributor.imecauthorVarela Pedreira, Olalla
dc.contributor.imecauthorDe Coster, Jeroen
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.imecauthorde Nooijer, Christine
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage202
dc.source.endpage214
dc.source.journalJournal of Microelectromechanical Systems
dc.source.issue1
dc.source.volume19
imec.availabilityPublished - open access


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