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Novel MEMS demonstrators show versatility of imec's SiGe MEMS platform

dc.contributor.authorWitvrouw, Ann
dc.contributor.authorVan Bavel, Mieke
dc.contributor.authorProvoost, Jan
dc.date.accessioned2021-10-19T00:33:19Z
dc.date.available2021-10-19T00:33:19Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18364
dc.sourceIIOimport
dc.titleNovel MEMS demonstrators show versatility of imec's SiGe MEMS platform
dc.typeMeeting abstract
dc.contributor.imecauthorVan Bavel, Mieke
dc.contributor.imecauthorProvoost, Jan
dc.source.peerreviewno
dc.source.conferenceSEMICON WEST Daily News
dc.source.conferencedate13/07/2010
dc.source.conferencelocationSan Francisco, CA USA
imec.availabilityPublished - imec


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