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Advanced materials enabling CMOS scaling roadmap

dc.contributor.authorWouters, Dirk
dc.date.accessioned2021-10-19T00:38:25Z
dc.date.available2021-10-19T00:38:25Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18374
dc.sourceIIOimport
dc.titleAdvanced materials enabling CMOS scaling roadmap
dc.typeProceedings paper
dc.source.peerreviewno
dc.source.conferenceSemicon West
dc.source.conferencedate13/07/2010
dc.source.conferencelocationSan Francisco, CA US
imec.availabilityPublished - imec


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