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Determination of mechanical and swelling properties of EPOCLAD negative photoresist

dc.contributor.authorWouters, Kristof
dc.contributor.authorVanstreels, Kris
dc.contributor.authorGijsenbergh, Pieter
dc.contributor.authorPuers, Bob
dc.date.accessioned2021-10-19T00:38:53Z
dc.date.available2021-10-19T00:38:53Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18375
dc.sourceIIOimport
dc.titleDetermination of mechanical and swelling properties of EPOCLAD negative photoresist
dc.typeProceedings paper
dc.contributor.imecauthorVanstreels, Kris
dc.contributor.imecauthorGijsenbergh, Pieter
dc.contributor.imecauthorPuers, Bob
dc.contributor.orcidimecVanstreels, Kris::0000-0002-4420-0966
dc.contributor.orcidimecGijsenbergh, Pieter::0000-0003-0135-6968
dc.source.peerreviewno
dc.source.beginpage84
dc.source.endpage87
dc.source.conference21st Micromechanics and Microsystems Europe Workshop - MME
dc.source.conferencedate26/09/2010
dc.source.conferencelocationEnschede Netherlands
imec.availabilityPublished - imec


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