Optimization of external poly base sheet resistance in 0.13um quasi self-aligned SiGe:C HBTs

Simple item page Full metadata Statistics

Author(s)

;

Van Huylenbroeck, Stefaan

;

;

Sibaja-Hernandez, Arturo

;

Venegas, Rafael

;

Van Wichelen, Koen

;

Decoutere, Stefaan

;

De Meyer, Kristin

Journal

Thin Solid Films

Metrics

1934 since deposited on 2021-10-19

Acq. date: 2025-10-23