Optimization of ion implantation condition for depletion-type silicon optical modulators

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Authors

Yu, Hui; Bogaerts, Wim; De Keersgieter, An

ISSN

0018-9197

Issue

12

Journal

IEEE Journal of Quantum Electronics

Volume

46

Title

Optimization of ion implantation condition for depletion-type silicon optical modulators

Publication type

Journal article

Embargo date

9999-12-31

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