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Optimization of ion implantation condition for depletion-type silicon optical modulators

dc.contributor.authorYu, Hui
dc.contributor.authorBogaerts, Wim
dc.contributor.authorDe Keersgieter, An
dc.date.accessioned2021-10-19T00:50:08Z
dc.date.available2021-10-19T00:50:08Z
dc.date.issued2010
dc.identifier.issn0018-9197
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18398
dc.sourceIIOimport
dc.titleOptimization of ion implantation condition for depletion-type silicon optical modulators
dc.typeJournal article
dc.contributor.imecauthorBogaerts, Wim
dc.contributor.imecauthorDe Keersgieter, An
dc.contributor.orcidimecBogaerts, Wim::0000-0003-1112-8950
dc.contributor.orcidimecDe Keersgieter, An::0000-0002-5527-8582
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage1763
dc.source.endpage1768
dc.source.journalIEEE Journal of Quantum Electronics
dc.source.issue12
dc.source.volume46
imec.availabilityPublished - open access


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