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Electron trap profiling near Al2O3/ gate interface in TANOS stack using gate-side-trap spectroscopy by charge injection and sensing
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Authors
Zahid, Mohammed
;
Arreghini, Antonio
;
Degraeve, Robin
;
Govoreanu, Bogdan
;
Suhane, Amit
;
Van Houdt, Jan
ISSN
0741-3106
Issue
10
Journal
IEEE Electron Device Letters
Volume
31
Title
Electron trap profiling near Al2O3/ gate interface in TANOS stack using gate-side-trap spectroscopy by charge injection and sensing
Publication type
Journal article
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