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Submicron active-passive integration for InP-based membranes on silicon

dc.contributor.authorZhang, R.
dc.contributor.authorBordas, F.
dc.contributor.authorvan der Tol, J.J.G.M.
dc.contributor.authorAmbrosius, H.
dc.contributor.authorRoelkens, Gunther
dc.contributor.authorDundar, M.A.
dc.contributor.authorSmit, M.K.
dc.contributor.authorThijs, P.
dc.date.accessioned2021-10-19T00:59:48Z
dc.date.available2021-10-19T00:59:48Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18417
dc.sourceIIOimport
dc.titleSubmicron active-passive integration for InP-based membranes on silicon
dc.typeProceedings paper
dc.contributor.imecauthorRoelkens, Gunther
dc.contributor.orcidimecRoelkens, Gunther::0000-0002-4667-5092
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.conference15th European Conference on Integrated Optics - ECIO
dc.source.conferencedate6/04/2010
dc.source.conferencelocationCambridge UK
imec.availabilityPublished - open access
imec.internalnotespaper ThH1


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