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Study of the transient phenomena in SIMS depth profiling using combined SIMS-RBS

dc.contributor.authorDeleu, Jeroen
dc.contributor.authorBrijs, Bert
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-09-30T08:10:13Z
dc.date.available2021-09-30T08:10:13Z
dc.date.issued1997
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1842
dc.sourceIIOimport
dc.titleStudy of the transient phenomena in SIMS depth profiling using combined SIMS-RBS
dc.typeOral presentation
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewno
dc.source.conferenceSIMS XI; 8-12 September 1997; Orlando, Florida, USA.
dc.source.conferencelocation
imec.availabilityPublished - imec


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