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Boron doping in hot filament MCD and NCD diamond films

dc.contributor.authorZimmer, Jerry
dc.contributor.authorHantschel, Thomas
dc.contributor.authorChandler, Gerry
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorPeralta, Maria
dc.date.accessioned2021-10-19T01:07:20Z
dc.date.available2021-10-19T01:07:20Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18432
dc.sourceIIOimport
dc.titleBoron doping in hot filament MCD and NCD diamond films
dc.typeProceedings paper
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.source.peerreviewyes
dc.source.beginpage1203-J12-01
dc.source.conferenceDiamond Electronics and Bioelectronics - Fundamentals to Applications III
dc.source.conferencedate30/11/2009
dc.source.conferencelocationBoston, MA USA
imec.availabilityPublished - imec
imec.internalnotesMRS Symposium Proceedings; Vol. 1203


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