dc.contributor.author | Alian, AliReza | |
dc.contributor.author | Brammertz, Guy | |
dc.contributor.author | Waldron, Niamh | |
dc.contributor.author | Merckling, Clement | |
dc.contributor.author | Hellings, Geert | |
dc.contributor.author | Lin, Dennis | |
dc.contributor.author | Wang, Wei-E | |
dc.contributor.author | Meuris, Marc | |
dc.contributor.author | Simoen, Eddy | |
dc.contributor.author | De Meyer, Kristin | |
dc.contributor.author | Heyns, Marc | |
dc.date.accessioned | 2021-10-19T12:28:46Z | |
dc.date.available | 2021-10-19T12:28:46Z | |
dc.date.issued | 2011 | |
dc.identifier.issn | 0167-9317 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/18466 | |
dc.source | IIOimport | |
dc.title | Silicon and selenium implantation and activation in In0.53Ga0.47As under low thermal budget conditions | |
dc.type | Journal article | |
dc.contributor.imecauthor | Alian, AliReza | |
dc.contributor.imecauthor | Brammertz, Guy | |
dc.contributor.imecauthor | Waldron, Niamh | |
dc.contributor.imecauthor | Merckling, Clement | |
dc.contributor.imecauthor | Hellings, Geert | |
dc.contributor.imecauthor | Lin, Dennis | |
dc.contributor.imecauthor | Meuris, Marc | |
dc.contributor.imecauthor | Simoen, Eddy | |
dc.contributor.imecauthor | De Meyer, Kristin | |
dc.contributor.imecauthor | Heyns, Marc | |
dc.contributor.orcidimec | Brammertz, Guy::0000-0003-1404-7339 | |
dc.contributor.orcidimec | Merckling, Clement::0000-0003-3084-2543 | |
dc.contributor.orcidimec | Hellings, Geert::0000-0002-5376-2119 | |
dc.contributor.orcidimec | Meuris, Marc::0000-0002-9580-6810 | |
dc.contributor.orcidimec | Simoen, Eddy::0000-0002-5218-4046 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 155 | |
dc.source.endpage | 158 | |
dc.source.journal | Microelectronic Engineering | |
dc.source.issue | 2 | |
dc.source.volume | 88 | |
imec.availability | Published - open access | |