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Silicon and selenium implantation and activation in In0.53Ga0.47As under low thermal budget conditions

dc.contributor.authorAlian, AliReza
dc.contributor.authorBrammertz, Guy
dc.contributor.authorWaldron, Niamh
dc.contributor.authorMerckling, Clement
dc.contributor.authorHellings, Geert
dc.contributor.authorLin, Dennis
dc.contributor.authorWang, Wei-E
dc.contributor.authorMeuris, Marc
dc.contributor.authorSimoen, Eddy
dc.contributor.authorDe Meyer, Kristin
dc.contributor.authorHeyns, Marc
dc.date.accessioned2021-10-19T12:28:46Z
dc.date.available2021-10-19T12:28:46Z
dc.date.issued2011
dc.identifier.issn0167-9317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18466
dc.sourceIIOimport
dc.titleSilicon and selenium implantation and activation in In0.53Ga0.47As under low thermal budget conditions
dc.typeJournal article
dc.contributor.imecauthorAlian, AliReza
dc.contributor.imecauthorBrammertz, Guy
dc.contributor.imecauthorWaldron, Niamh
dc.contributor.imecauthorMerckling, Clement
dc.contributor.imecauthorHellings, Geert
dc.contributor.imecauthorLin, Dennis
dc.contributor.imecauthorMeuris, Marc
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.imecauthorDe Meyer, Kristin
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecBrammertz, Guy::0000-0003-1404-7339
dc.contributor.orcidimecMerckling, Clement::0000-0003-3084-2543
dc.contributor.orcidimecHellings, Geert::0000-0002-5376-2119
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage155
dc.source.endpage158
dc.source.journalMicroelectronic Engineering
dc.source.issue2
dc.source.volume88
imec.availabilityPublished - open access


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