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Silicon and selenium implantation and activation in In0.53Ga0.47As under low thermal budget conditions
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Authors
Alian, AliReza
;
Brammertz, Guy
;
Waldron, Niamh
;
Merckling, Clement
;
Hellings, Geert
;
Lin, Dennis
;
Wang, Wei-E
;
Meuris, Marc
;
Simoen, Eddy
;
De Meyer, Kristin
;
Heyns, Marc
ISSN
0167-9317
Issue
2
Journal
Microelectronic Engineering
Volume
88
Title
Silicon and selenium implantation and activation in In0.53Ga0.47As under low thermal budget conditions
Publication type
Journal article
Embargo date
9999-12-31
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