Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Articles
Silicon and selenium implantation and activation in In0.53Ga0.47As under low thermal budget conditions
Publication:
Silicon and selenium implantation and activation in In0.53Ga0.47As under low thermal budget conditions
Copy permalink
Date
2011
Journal article
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
21456.pdf
848.98 KB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Alian, AliReza
;
Brammertz, Guy
;
Waldron, Niamh
;
Merckling, Clement
;
Hellings, Geert
;
Lin, Dennis
;
Wang, Wei-E
;
Meuris, Marc
;
Simoen, Eddy
;
De Meyer, Kristin
;
Heyns, Marc
Journal
Microelectronic Engineering
Abstract
Description
Metrics
Views
1781
since deposited on 2021-10-19
Acq. date: 2025-12-15
Citations
Metrics
Views
1781
since deposited on 2021-10-19
Acq. date: 2025-12-15
Citations