Publication:
Plasma smoothing of extreme ultraviolet photoresist: LWR reduction at 30nm half pitch
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1891 since deposited on 2021-10-19
1last month
Acq. date: 2026-04-14
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Statistics
Views
1891 since deposited on 2021-10-19
1last month
Acq. date: 2026-04-14
Citations