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Pore sealing of porous low-k films by SAMs for ALD

dc.contributor.authorArmini, Silvia
dc.contributor.authorVerdonck, Patrick
dc.contributor.authorLoyo Prado, Jana
dc.contributor.authorKrishtab, Mikhail
dc.contributor.authorSwerts, Johan
dc.contributor.authorCiofi, Ivan
dc.contributor.authorMeerschaut, Johan
dc.contributor.authorKim, Tae-Gon
dc.contributor.authorAdelmann, Christoph
dc.contributor.authorLe Quoc, Toan
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorDelabie, Annelies
dc.contributor.authorLeunissen, Peter
dc.contributor.authorBaklanov, Mikhaïl
dc.date.accessioned2021-10-19T12:29:39Z
dc.date.available2021-10-19T12:29:39Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18490
dc.sourceIIOimport
dc.titlePore sealing of porous low-k films by SAMs for ALD
dc.typeOral presentation
dc.contributor.imecauthorArmini, Silvia
dc.contributor.imecauthorVerdonck, Patrick
dc.contributor.imecauthorLoyo Prado, Jana
dc.contributor.imecauthorKrishtab, Mikhail
dc.contributor.imecauthorSwerts, Johan
dc.contributor.imecauthorCiofi, Ivan
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.orcidimecArmini, Silvia::0000-0003-0578-3422
dc.contributor.orcidimecVerdonck, Patrick::0000-0003-2454-0602
dc.contributor.orcidimecCiofi, Ivan::0000-0003-1374-4116
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.source.peerreviewno
dc.source.conferenceALD for Nanotechnology Applications
dc.source.conferencedate28/11/2011
dc.source.conferencelocationLeuven Belgium
dc.identifier.urlhttp://www2.imec.be/be_en/education/conferences/ald-workshop.html
imec.availabilityPublished - imec


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