Materials with ultra low dielectric constant for nanoelectronics
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.date.accessioned | 2021-10-19T12:31:12Z | |
| dc.date.available | 2021-10-19T12:31:12Z | |
| dc.date.issued | 2011 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/18519 | |
| dc.source | IIOimport | |
| dc.title | Materials with ultra low dielectric constant for nanoelectronics | |
| dc.type | Meeting abstract | |
| dc.source.peerreview | no | |
| dc.source.conference | Rusnanotech: Nanotechnology International Forum | |
| dc.source.conferencedate | 26/10/2011 | |
| dc.source.conferencelocation | Moscow Russia | |
| imec.availability | Published - imec |
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