Low-k films and dielectric barriers for 22 nm technology node and beyond
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.date.accessioned | 2021-10-19T12:31:15Z | |
| dc.date.available | 2021-10-19T12:31:15Z | |
| dc.date.issued | 2011 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/18520 | |
| dc.source | IIOimport | |
| dc.title | Low-k films and dielectric barriers for 22 nm technology node and beyond | |
| dc.type | Oral presentation | |
| dc.source.peerreview | no | |
| dc.source.conference | 10th European Seminar "Porous Glasses - Special Glasses" | |
| dc.source.conferencedate | 30/08/2011 | |
| dc.source.conferencelocation | Wroclaw Poland | |
| imec.availability | Published - imec |
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