Authors

Baklanov, Mikhaïl; Guschin, O.; Ignatov, P.; Yafarov, R.; Yanovich, S.

Conference

4th International Workshop on Plasma Etch and Strip in Microelectronics - PESM

Title

Nanostructured silicon surface morphology formation under highly ionized microwave plasma conditions

Publication type

Oral presentation

Embargo date

9999-12-31