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Low-k films for 22 nm technology node and beyond

dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorZhao, Larry
dc.date.accessioned2021-10-19T12:31:32Z
dc.date.available2021-10-19T12:31:32Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18525
dc.sourceIIOimport
dc.titleLow-k films for 22 nm technology node and beyond
dc.typeOral presentation
dc.source.peerreviewno
dc.source.conferenceRusnanoforum 2011
dc.source.conferencedate25/10/2011
dc.source.conferencelocationMoscow Russia
imec.availabilityPublished - imec


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