Show simple item record

Effect of porogen residue on electrical characteristics of ultra low-k materials

dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorZhao, Larry
dc.contributor.authorVan Besien, Els
dc.contributor.authorPantouvaki, Marianna
dc.date.accessioned2021-10-19T12:31:35Z
dc.date.available2021-10-19T12:31:35Z
dc.date.issued2011
dc.identifier.issn0167-9317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18526
dc.sourceIIOimport
dc.titleEffect of porogen residue on electrical characteristics of ultra low-k materials
dc.typeJournal article
dc.contributor.imecauthorVan Besien, Els
dc.contributor.imecauthorPantouvaki, Marianna
dc.contributor.orcidimecVan Besien, Els::0000-0002-5174-2229
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage990
dc.source.endpage993
dc.source.journalMicroelectronic Engineering
dc.source.issue6
dc.source.volume88
imec.availabilityPublished - open access


Files in this item

Thumbnail
Name:
21855.pdf
Size:
477.0Kb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record