Effect of porogen residue on electrical characteristics of ultra low-k materials

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Authors

Baklanov, Mikhaïl; Zhao, Larry; Van Besien, Els; Pantouvaki, Marianna

ISSN

0167-9317

Issue

6

Journal

Microelectronic Engineering

Volume

88

Title

Effect of porogen residue on electrical characteristics of ultra low-k materials

Publication type

Journal article

Embargo date

9999-12-31

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