Publication:

Effect of porogen residue on electrical characteristics of ultra low-k materials

Date

2011
Journal article
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dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorZhao, Larry
dc.contributor.authorVan Besien, Els
dc.contributor.authorPantouvaki, Marianna
dc.contributor.imecauthorVan Besien, Els
dc.contributor.imecauthorPantouvaki, Marianna
dc.contributor.orcidimecVan Besien, Els::0000-0002-5174-2229
dc.date.accessioned2021-10-19T12:31:35Z
dc.date.available2021-10-19T12:31:35Z
dc.date.embargo9999-12-31
dc.date.issued2011
dc.identifier.issn0167-9317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18526
dc.source.beginpage990
dc.source.endpage993
dc.source.issue6
dc.source.journalMicroelectronic Engineering
dc.source.volume88
dc.title

Effect of porogen residue on electrical characteristics of ultra low-k materials

dc.typeJournal article
dspace.entity.typePublication
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