Show simple item record

CMOS compatible SiGe micromirrors

dc.contributor.authorBeernaert, Roel
dc.contributor.authorAvci, Aykut
dc.contributor.authorDe Smet, Jelle
dc.contributor.authorDe Coster, Jeroen
dc.contributor.authorWitvrouw, Ann
dc.contributor.authorDe Smet, Herbert
dc.date.accessioned2021-10-19T12:32:27Z
dc.date.available2021-10-19T12:32:27Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18539
dc.sourceIIOimport
dc.titleCMOS compatible SiGe micromirrors
dc.typeProceedings paper
dc.contributor.imecauthorDe Coster, Jeroen
dc.contributor.imecauthorDe Smet, Herbert
dc.source.peerreviewno
dc.source.conferenceThe XXXI International Display Research Conference
dc.source.conferencedate19/09/2011
dc.source.conferencelocationBordeaux-Arcachon France
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record