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Scanner matching for standard and freeform illumination shapes using FlexRay

dc.contributor.authorBekaert, Joost
dc.contributor.authorVan Look, Lieve
dc.contributor.authorD'have, Koen
dc.contributor.authorLaenens, Bart
dc.contributor.authorVandenberghe, Geert
dc.contributor.authorVan Adrichem, Paul
dc.contributor.authorShao, Wenjin
dc.contributor.authorGhan, J.
dc.contributor.authorSchreel, Koen
dc.contributor.authorNeumann, Jens Timo
dc.date.accessioned2021-10-19T12:32:37Z
dc.date.available2021-10-19T12:32:37Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18541
dc.sourceIIOimport
dc.titleScanner matching for standard and freeform illumination shapes using FlexRay
dc.typeProceedings paper
dc.contributor.imecauthorBekaert, Joost
dc.contributor.imecauthorVan Look, Lieve
dc.contributor.imecauthorD'have, Koen
dc.contributor.imecauthorVandenberghe, Geert
dc.contributor.imecauthorVan Adrichem, Paul
dc.contributor.orcidimecBekaert, Joost::0000-0003-3075-3479
dc.contributor.orcidimecD'have, Koen::0000-0002-5195-9241
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage79731I
dc.source.conferenceOptical Microlithography XXIV
dc.source.conferencedate27/02/2011
dc.source.conferencelocationSan Jose, CA USA
imec.availabilityPublished - open access
imec.internalnotesProceedings SPIE; Vol. 7973


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