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Characterization and control of dynamic lens heating effects under high-volume manufacturing conditions

dc.contributor.authorBekaert, Joost
dc.contributor.authorVan Look, Lieve
dc.contributor.authorVandenberghe, Geert
dc.contributor.authorVan Adrichem, Paul
dc.contributor.authorMaslow, Mark J.
dc.contributor.authorGemmink, Jan-Willem
dc.contributor.authorCao, Hua
dc.contributor.authorHunsche, Stefan
dc.contributor.authorNeumann, Jens Timo
dc.contributor.authorWolf, Alexander
dc.date.accessioned2021-10-19T12:32:42Z
dc.date.available2021-10-19T12:32:42Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18542
dc.sourceIIOimport
dc.titleCharacterization and control of dynamic lens heating effects under high-volume manufacturing conditions
dc.typeProceedings paper
dc.contributor.imecauthorBekaert, Joost
dc.contributor.imecauthorVan Look, Lieve
dc.contributor.imecauthorVandenberghe, Geert
dc.contributor.imecauthorVan Adrichem, Paul
dc.contributor.orcidimecBekaert, Joost::0000-0003-3075-3479
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage79730V
dc.source.conferenceOptical Microlithography XXIV
dc.source.conferencedate27/02/2011
dc.source.conferencelocationSan Jose, CA USA
imec.availabilityPublished - open access
imec.internalnotesProceedings SPIE, Vol. 7973


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