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Hexagonal boron nitride nanowalls synthesized by unbalanced RF magnetron sputtering

dc.contributor.authorBenMoussa, B.
dc.contributor.authorD'Haen, Jan
dc.contributor.authorBorschel, Christian
dc.contributor.authorSaitner, Marc
dc.contributor.authorSoltani, Ali
dc.contributor.authorMortet, Vincent
dc.contributor.authorRonning, Carsten
dc.contributor.authorD'Olieslaeger, Marc
dc.contributor.authorBoyen, Hans-Gerd
dc.contributor.authorHaenen, Ken
dc.date.accessioned2021-10-19T12:33:33Z
dc.date.available2021-10-19T12:33:33Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18553
dc.sourceIIOimport
dc.titleHexagonal boron nitride nanowalls synthesized by unbalanced RF magnetron sputtering
dc.typeProceedings paper
dc.contributor.imecauthorD'Haen, Jan
dc.contributor.imecauthorD'Olieslaeger, Marc
dc.contributor.imecauthorBoyen, Hans-Gerd
dc.contributor.imecauthorHaenen, Ken
dc.contributor.orcidimecHaenen, Ken::0000-0001-6711-7367
dc.contributor.orcidimecD'Olieslaeger, Marc::0000-0001-7951-8037
dc.contributor.orcidimecBoyen, Hans-Gerd::0000-0003-0711-7597
dc.source.peerreviewno
dc.source.conferenceBoron and Boron Compounds - From Fundamentals to Applications
dc.source.conferencedate29/11/2010
dc.source.conferencelocationBoston, MA USA
imec.availabilityPublished - imec
imec.internalnotesMRS Symposium Proceedings; Vol. 1307


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