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Impact of using filtration on global and local uniformity of spin on glue materials

dc.contributor.authorBernard, Sophie
dc.contributor.authorMiller, Andy
dc.contributor.authorDuval, Fabrice
dc.contributor.authorPepper, V.
dc.contributor.authorBraggin, J.
dc.date.accessioned2021-10-19T12:33:46Z
dc.date.available2021-10-19T12:33:46Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18556
dc.sourceIIOimport
dc.titleImpact of using filtration on global and local uniformity of spin on glue materials
dc.typeProceedings paper
dc.contributor.imecauthorMiller, Andy
dc.contributor.imecauthorDuval, Fabrice
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage79260F
dc.source.conferenceMicromachining and Microfabrication Process Technology XVI
dc.source.conferencedate22/01/2011
dc.source.conferencelocationSan-Francisco, CA USA
imec.availabilityPublished - open access
imec.internalnotesProceedings of SPIE; Vol. 7926


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