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3D system integration technology convergence, progress and challenges

dc.contributor.authorBeyne, Eric
dc.date.accessioned2021-10-19T12:35:03Z
dc.date.available2021-10-19T12:35:03Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18572
dc.sourceIIOimport
dc.title3D system integration technology convergence, progress and challenges
dc.typeProceedings paper
dc.contributor.imecauthorBeyne, Eric
dc.contributor.orcidimecBeyne, Eric::0000-0002-3096-050X
dc.source.peerreviewno
dc.source.conferenceSemicon Europa, 3D-IC Session
dc.source.conferencedate13/10/2011
dc.source.conferencelocationDresden Germany
imec.availabilityPublished - imec


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