Challenges in 3D system integration beyond TSV processing
dc.contributor.author | Beyne, Eric | |
dc.date.accessioned | 2021-10-19T12:35:13Z | |
dc.date.available | 2021-10-19T12:35:13Z | |
dc.date.issued | 2011 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/18574 | |
dc.source | IIOimport | |
dc.title | Challenges in 3D system integration beyond TSV processing | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Beyne, Eric | |
dc.contributor.orcidimec | Beyne, Eric::0000-0002-3096-050X | |
dc.source.peerreview | no | |
dc.source.conference | 3-D Architectures for Semiconductor Integration and Packaging | |
dc.source.conferencedate | 12/12/2011 | |
dc.source.conferencelocation | Burlingame, CA USA | |
imec.availability | Published - imec |
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