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Temporary protective packaging for optical MEMS

dc.contributor.authorBogaerts, Lieve
dc.contributor.authorPhommahaxay, Alain
dc.contributor.authorGerets, Carine
dc.contributor.authorJaenen, Patrick
dc.contributor.authorVan Hoof, Rita
dc.contributor.authorSeveri, Simone
dc.contributor.authorVan De Peer, Myriam
dc.contributor.authorDe Coster, Jeroen
dc.contributor.authorLa Manna, Antonio
dc.contributor.authorSoussan, Philippe
dc.contributor.authorWitvrouw, Ann
dc.date.accessioned2021-10-19T12:36:32Z
dc.date.available2021-10-19T12:36:32Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18589
dc.sourceIIOimport
dc.titleTemporary protective packaging for optical MEMS
dc.typeProceedings paper
dc.contributor.imecauthorBogaerts, Lieve
dc.contributor.imecauthorPhommahaxay, Alain
dc.contributor.imecauthorGerets, Carine
dc.contributor.imecauthorJaenen, Patrick
dc.contributor.imecauthorVan Hoof, Rita
dc.contributor.imecauthorSeveri, Simone
dc.contributor.imecauthorVan De Peer, Myriam
dc.contributor.imecauthorDe Coster, Jeroen
dc.contributor.imecauthorLa Manna, Antonio
dc.contributor.imecauthorSoussan, Philippe
dc.contributor.orcidimecSoussan, Philippe::0000-0002-1347-6978
dc.source.peerreviewno
dc.source.conferenceIMAPS
dc.source.conferencedate9/10/2011
dc.source.conferencelocationLong Beach, CA California-USA
imec.availabilityPublished - imec


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