dc.contributor.author | Bogaerts, Lieve | |
dc.contributor.author | Phommahaxay, Alain | |
dc.contributor.author | Gerets, Carine | |
dc.contributor.author | Jaenen, Patrick | |
dc.contributor.author | Van Hoof, Rita | |
dc.contributor.author | Severi, Simone | |
dc.contributor.author | Van De Peer, Myriam | |
dc.contributor.author | De Coster, Jeroen | |
dc.contributor.author | La Manna, Antonio | |
dc.contributor.author | Soussan, Philippe | |
dc.contributor.author | Witvrouw, Ann | |
dc.date.accessioned | 2021-10-19T12:36:32Z | |
dc.date.available | 2021-10-19T12:36:32Z | |
dc.date.issued | 2011 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/18589 | |
dc.source | IIOimport | |
dc.title | Temporary protective packaging for optical MEMS | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Bogaerts, Lieve | |
dc.contributor.imecauthor | Phommahaxay, Alain | |
dc.contributor.imecauthor | Gerets, Carine | |
dc.contributor.imecauthor | Jaenen, Patrick | |
dc.contributor.imecauthor | Van Hoof, Rita | |
dc.contributor.imecauthor | Severi, Simone | |
dc.contributor.imecauthor | Van De Peer, Myriam | |
dc.contributor.imecauthor | De Coster, Jeroen | |
dc.contributor.imecauthor | La Manna, Antonio | |
dc.contributor.imecauthor | Soussan, Philippe | |
dc.contributor.orcidimec | Soussan, Philippe::0000-0002-1347-6978 | |
dc.source.peerreview | no | |
dc.source.conference | IMAPS | |
dc.source.conferencedate | 9/10/2011 | |
dc.source.conferencelocation | Long Beach, CA California-USA | |
imec.availability | Published - imec | |