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Generation of plama in liquid using RF and ultrasounds

dc.contributor.authorCamerotto, Elisabeth
dc.contributor.authorDe Schepper, Peter
dc.contributor.authorCallant, Ivan
dc.contributor.authorShamiryan, Denis
dc.contributor.authorBoullart, Werner
dc.contributor.authorDe Gendt, Stefan
dc.date.accessioned2021-10-19T12:41:39Z
dc.date.available2021-10-19T12:41:39Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18636
dc.sourceIIOimport
dc.titleGeneration of plama in liquid using RF and ultrasounds
dc.typeMeeting abstract
dc.contributor.imecauthorCamerotto, Elisabeth
dc.contributor.imecauthorDe Schepper, Peter
dc.contributor.imecauthorCallant, Ivan
dc.contributor.imecauthorBoullart, Werner
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.orcidimecBoullart, Werner::0000-0001-7614-2097
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.conference4th International Workshop on Plasma Etch and Strip in Microelectronics - PESM
dc.source.conferencedate5/05/2011
dc.source.conferencelocationMechelen Belgium
dc.identifier.urlhttp://www.pesm2011.be/Pesm2011/Program_Friday_files/05.02_ECamerotto.pdf
imec.availabilityPublished - open access


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