dc.contributor.author | Camerotto, Elisabeth | |
dc.contributor.author | De Schepper, Peter | |
dc.contributor.author | Callant, Ivan | |
dc.contributor.author | Shamiryan, Denis | |
dc.contributor.author | Boullart, Werner | |
dc.contributor.author | De Gendt, Stefan | |
dc.date.accessioned | 2021-10-19T12:41:39Z | |
dc.date.available | 2021-10-19T12:41:39Z | |
dc.date.issued | 2011 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/18636 | |
dc.source | IIOimport | |
dc.title | Generation of plama in liquid using RF and ultrasounds | |
dc.type | Meeting abstract | |
dc.contributor.imecauthor | Camerotto, Elisabeth | |
dc.contributor.imecauthor | De Schepper, Peter | |
dc.contributor.imecauthor | Callant, Ivan | |
dc.contributor.imecauthor | Boullart, Werner | |
dc.contributor.imecauthor | De Gendt, Stefan | |
dc.contributor.orcidimec | Boullart, Werner::0000-0001-7614-2097 | |
dc.contributor.orcidimec | De Gendt, Stefan::0000-0003-3775-3578 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.conference | 4th International Workshop on Plasma Etch and Strip in Microelectronics - PESM | |
dc.source.conferencedate | 5/05/2011 | |
dc.source.conferencelocation | Mechelen Belgium | |
dc.identifier.url | http://www.pesm2011.be/Pesm2011/Program_Friday_files/05.02_ECamerotto.pdf | |
imec.availability | Published - open access | |