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Development of 2-step plasma texturing process for crystalline silicon solar cells with Linear Microwave Plasma Sources (LPS)

dc.contributor.authorChan, BT
dc.contributor.authorKunnen, Eddy
dc.contributor.authorShamiryan, Denis
dc.contributor.authorXu, Kaidong
dc.contributor.authorBoullart, Werner
dc.date.accessioned2021-10-19T12:43:21Z
dc.date.available2021-10-19T12:43:21Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18650
dc.sourceIIOimport
dc.titleDevelopment of 2-step plasma texturing process for crystalline silicon solar cells with Linear Microwave Plasma Sources (LPS)
dc.typeMeeting abstract
dc.contributor.imecauthorChan, BT
dc.contributor.imecauthorBoullart, Werner
dc.contributor.orcidimecChan, BT::0000-0003-2890-0388
dc.contributor.orcidimecBoullart, Werner::0000-0001-7614-2097
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.conference4th International Workshop Plasma Etch and Strip in Microelectronics - PESM
dc.source.conferencedate5/05/2011
dc.source.conferencelocationMechelen Belgium
dc.identifier.urlhttp://www.pesm2011.be/Pesm2011/Program_Friday_files/05.03_BTChan.pdf
imec.availabilityPublished - open access


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