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Implementing plasma texturing process with linear microwave plasma sources for ultra-thin multi-crytalline (<150um) solar cells

dc.contributor.authorChan, BT
dc.contributor.authorKunnen, Eddy
dc.contributor.authorUhlig, Matthias
dc.contributor.authorXu, Kaidong
dc.contributor.authorBoullart, Werner
dc.contributor.authorRau, Bernd
dc.contributor.authorPoortmans, Jef
dc.date.accessioned2021-10-19T12:43:29Z
dc.date.available2021-10-19T12:43:29Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18651
dc.sourceIIOimport
dc.titleImplementing plasma texturing process with linear microwave plasma sources for ultra-thin multi-crytalline (<150um) solar cells
dc.typeProceedings paper
dc.contributor.imecauthorChan, BT
dc.contributor.imecauthorBoullart, Werner
dc.contributor.imecauthorPoortmans, Jef
dc.contributor.orcidimecChan, BT::0000-0003-2890-0388
dc.contributor.orcidimecBoullart, Werner::0000-0001-7614-2097
dc.contributor.orcidimecPoortmans, Jef::0000-0003-2077-2545
dc.source.peerreviewno
dc.source.conference21st International Photovoltaic Science and Engineering Conference - PVSEC
dc.source.conferencedate28/11/2011
dc.source.conferencelocationFukuoka Japan
imec.availabilityPublished - imec


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