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Simple current and capacitance methods for bulk FinFET height extraction

dc.contributor.authorChiarella, Thomas
dc.contributor.authorParvais, Bertrand
dc.contributor.authorHoriguchi, Naoto
dc.contributor.authorTogo, Mitsuhiro
dc.contributor.authorKerner, Christoph
dc.contributor.authorWitters, Liesbeth
dc.contributor.authorAbsil, Philippe
dc.contributor.authorBiesemans, Serge
dc.contributor.authorHoffmann, Thomas Y.
dc.date.accessioned2021-10-19T12:47:55Z
dc.date.available2021-10-19T12:47:55Z
dc.date.issued2011-03
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18682
dc.sourceIIOimport
dc.titleSimple current and capacitance methods for bulk FinFET height extraction
dc.typeProceedings paper
dc.contributor.imecauthorChiarella, Thomas
dc.contributor.imecauthorParvais, Bertrand
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.imecauthorKerner, Christoph
dc.contributor.imecauthorWitters, Liesbeth
dc.contributor.imecauthorAbsil, Philippe
dc.contributor.imecauthorBiesemans, Serge
dc.contributor.orcidimecChiarella, Thomas::0000-0002-6155-9030
dc.contributor.orcidimecParvais, Bertrand::0000-0003-0769-7069
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage158
dc.source.endpage161
dc.source.conferenceIEEE International Conference on Microelectronic Test Structures - ICMTS
dc.source.conferencedate4/04/2011
dc.source.conferencelocationAmsterdam The Netherlands
imec.availabilityPublished - open access


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