dc.contributor.author | Chiarella, Thomas | |
dc.contributor.author | Parvais, Bertrand | |
dc.contributor.author | Horiguchi, Naoto | |
dc.contributor.author | Togo, Mitsuhiro | |
dc.contributor.author | Kerner, Christoph | |
dc.contributor.author | Witters, Liesbeth | |
dc.contributor.author | Absil, Philippe | |
dc.contributor.author | Biesemans, Serge | |
dc.contributor.author | Hoffmann, Thomas Y. | |
dc.date.accessioned | 2021-10-19T12:47:55Z | |
dc.date.available | 2021-10-19T12:47:55Z | |
dc.date.issued | 2011-03 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/18682 | |
dc.source | IIOimport | |
dc.title | Simple current and capacitance methods for bulk FinFET height extraction | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Chiarella, Thomas | |
dc.contributor.imecauthor | Parvais, Bertrand | |
dc.contributor.imecauthor | Horiguchi, Naoto | |
dc.contributor.imecauthor | Kerner, Christoph | |
dc.contributor.imecauthor | Witters, Liesbeth | |
dc.contributor.imecauthor | Absil, Philippe | |
dc.contributor.imecauthor | Biesemans, Serge | |
dc.contributor.orcidimec | Chiarella, Thomas::0000-0002-6155-9030 | |
dc.contributor.orcidimec | Parvais, Bertrand::0000-0003-0769-7069 | |
dc.contributor.orcidimec | Horiguchi, Naoto::0000-0001-5490-0416 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 158 | |
dc.source.endpage | 161 | |
dc.source.conference | IEEE International Conference on Microelectronic Test Structures - ICMTS | |
dc.source.conferencedate | 4/04/2011 | |
dc.source.conferencelocation | Amsterdam The Netherlands | |
imec.availability | Published - open access | |