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Integration and electrical characterization of carbon nanotube via interconnects

dc.contributor.authorChiodarelli, Nicolo
dc.contributor.authorLi, Yunlong
dc.contributor.authorCott, Daire
dc.contributor.authorMertens, Sofie
dc.contributor.authorPeys, Nick
dc.contributor.authorHeyns, Marc
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorGroeseneken, Guido
dc.contributor.authorVereecken, Philippe
dc.date.accessioned2021-10-19T12:48:23Z
dc.date.available2021-10-19T12:48:23Z
dc.date.issued2011
dc.identifier.issn0167-9317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18685
dc.sourceIIOimport
dc.titleIntegration and electrical characterization of carbon nanotube via interconnects
dc.typeJournal article
dc.contributor.imecauthorLi, Yunlong
dc.contributor.imecauthorCott, Daire
dc.contributor.imecauthorMertens, Sofie
dc.contributor.imecauthorHeyns, Marc
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.imecauthorVereecken, Philippe
dc.contributor.orcidimecLi, Yunlong::0000-0003-4791-4013
dc.contributor.orcidimecMertens, Sofie::0000-0002-1482-6730
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.contributor.orcidimecVereecken, Philippe::0000-0003-4115-0075
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage837
dc.source.endpage843
dc.source.journalMicroelectronic Engineering
dc.source.issue5
dc.source.volume88
imec.availabilityPublished - open access


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