Integration and electrical characterization of carbon nanotube via interconnects

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Authors

Chiodarelli, Nicolo; Li, Yunlong; Cott, Daire; Mertens, Sofie; Peys, Nick; Heyns, Marc; De Gendt, Stefan; Groeseneken, Guido; Vereecken, Philippe

ISSN

0167-9317

Issue

5

Journal

Microelectronic Engineering

Volume

88

Title

Integration and electrical characterization of carbon nanotube via interconnects

Publication type

Journal article

Embargo date

9999-12-31

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