Publication:

Integration and electrical characterization of carbon nanotube via interconnects

Date

2011
Journal article
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dc.contributor.authorChiodarelli, Nicolo
dc.contributor.authorLi, Yunlong
dc.contributor.authorCott, Daire
dc.contributor.authorMertens, Sofie
dc.contributor.authorPeys, Nick
dc.contributor.authorHeyns, Marc
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorGroeseneken, Guido
dc.contributor.authorVereecken, Philippe
dc.contributor.imecauthorLi, Yunlong
dc.contributor.imecauthorCott, Daire
dc.contributor.imecauthorMertens, Sofie
dc.contributor.imecauthorHeyns, Marc
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.imecauthorVereecken, Philippe
dc.contributor.orcidimecLi, Yunlong::0000-0003-4791-4013
dc.contributor.orcidimecMertens, Sofie::0000-0002-1482-6730
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.contributor.orcidimecVereecken, Philippe::0000-0003-4115-0075
dc.date.accessioned2021-10-19T12:48:23Z
dc.date.available2021-10-19T12:48:23Z
dc.date.embargo9999-12-31
dc.date.issued2011
dc.identifier.issn0167-9317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18685
dc.source.beginpage837
dc.source.endpage843
dc.source.issue5
dc.source.journalMicroelectronic Engineering
dc.source.volume88
dc.title

Integration and electrical characterization of carbon nanotube via interconnects

dc.typeJournal article
dspace.entity.typePublication
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