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Integration and electrical characterization of carbon nanotube via interconnects
Publication:
Integration and electrical characterization of carbon nanotube via interconnects
Date
2011
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Chiodarelli, Nicolo
;
Li, Yunlong
;
Cott, Daire
;
Mertens, Sofie
;
Peys, Nick
;
Heyns, Marc
;
De Gendt, Stefan
;
Groeseneken, Guido
;
Vereecken, Philippe
Journal
Microelectronic Engineering
Abstract
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1938
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Acq. date: 2025-12-09
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Metrics
Views
1938
since deposited on 2021-10-19
2
last month
1
last week
Acq. date: 2025-12-09
Citations