Publication:

Integration and electrical characterization of carbon nanotube via interconnects

Date

2011

Journal article

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Files

20678.pdf 1.07 MB

Author(s)

Chiodarelli, Nicolo

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De Gendt, Stefan

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Groeseneken, Guido

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Vereecken, Philippe

Journal

Microelectronic Engineering

Statistics

1946 since deposited on 2021-10-19

Acq. date: 2026-09-12