Study of nitrogen impact on VFB-EOT roll-off by varying interfacial SiO2 thickness

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Authors

Cho, Moon Ju; Akheyar, Amal; Aoulaiche, Marc; Degraeve, Robin; Ragnarsson, Lars-Ake; Tseng, Joshua; Hoffmann, Thomas Y.; Groeseneken, Guido

ISSN

0038-1101

Issue

1

Journal

Solid-State Electronics

Volume

62

Title

Study of nitrogen impact on VFB-EOT roll-off by varying interfacial SiO2 thickness

Publication type

Journal article

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