Study of nitrogen impact on VFB-EOT roll-off by varying interfacial SiO2 thickness

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Author(s)

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Aoulaiche, Marc

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Degraeve, Robin

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Ragnarsson, Lars-Ake

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Hoffmann, Thomas Y.

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Groeseneken, Guido

Journal

Solid-State Electronics

Metrics

1912 since deposited on 2021-10-19

Acq. date: 2025-10-24