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Siconi for bulk FinFET (BFFT) recess etch

dc.contributor.authorCockburn, Andrew
dc.contributor.authorGravey, Virginie
dc.contributor.authorXu, T.
dc.contributor.authorDiehl, D.
dc.contributor.authorRedolfi, Augusto
dc.date.accessioned2021-10-19T12:53:09Z
dc.date.available2021-10-19T12:53:09Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18715
dc.sourceIIOimport
dc.titleSiconi for bulk FinFET (BFFT) recess etch
dc.typeOral presentation
dc.contributor.imecauthorCockburn, Andrew
dc.contributor.imecauthorRedolfi, Augusto
dc.source.peerreviewno
dc.source.conferenceAMAT ET Conference
dc.source.conferencedate21/06/2011
dc.source.conferencelocationLas Vegas, NV USA
imec.availabilityPublished - imec


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