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Comparison between intrinsic and integrated reliability properties of low-k materials

dc.contributor.authorCroes, Kristof
dc.contributor.authorPantouvaki, Marianna
dc.contributor.authorCarbonell, Laure
dc.contributor.authorZhao, Larry
dc.contributor.authorBeyer, Gerald
dc.contributor.authorTokei, Zsolt
dc.date.accessioned2021-10-19T12:59:07Z
dc.date.available2021-10-19T12:59:07Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18753
dc.sourceIIOimport
dc.titleComparison between intrinsic and integrated reliability properties of low-k materials
dc.typeMeeting abstract
dc.contributor.imecauthorCroes, Kristof
dc.contributor.imecauthorPantouvaki, Marianna
dc.contributor.imecauthorBeyer, Gerald
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage142
dc.source.endpage148
dc.source.conferenceIEEE International Reliability Physics Symposium - IRPS
dc.source.conferencedate10/04/2011
dc.source.conferencelocationMonterey, CA USA
imec.availabilityPublished - open access
imec.internalnotes2F.3


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