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Implementation issues in MEMS reliability test setups

dc.contributor.authorDe Coster, Jeroen
dc.contributor.authorTilmans, Harrie
dc.contributor.authorDe Wolf, Ingrid
dc.date.accessioned2021-10-19T13:03:59Z
dc.date.available2021-10-19T13:03:59Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18780
dc.sourceIIOimport
dc.titleImplementation issues in MEMS reliability test setups
dc.typeOral presentation
dc.contributor.imecauthorDe Coster, Jeroen
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.source.peerreviewno
dc.source.conferenceiNEMI Worshop MEMS Needs & Opportunities
dc.source.conferencedate15/09/2011
dc.source.conferencelocationBrighton United Kingdom
imec.availabilityPublished - imec


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