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Proton formation and diffusion in amorphous SiNx:H

dc.contributor.authorDekkers, Harold
dc.contributor.authorPrajapati, Victor
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorVancoille, Eric
dc.date.accessioned2021-10-19T13:11:54Z
dc.date.available2021-10-19T13:11:54Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18821
dc.sourceIIOimport
dc.titleProton formation and diffusion in amorphous SiNx:H
dc.typeProceedings paper
dc.contributor.imecauthorDekkers, Harold
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorVancoille, Eric
dc.contributor.orcidimecDekkers, Harold::0000-0003-4778-5709
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.identifier.doi10.1557/opl.2011.1252
dc.source.peerreviewno
dc.source.beginpageJ2.2
dc.source.conferenceProtons in Solids
dc.source.conferencedate25/04/2011
dc.source.conferencelocationSan Fransisco, CA USA
imec.availabilityPublished - imec
imec.internalnotesMRS Proceedings, Vol. 1330E


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