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Ozone based atomic layer deposition of hafnium oxide and impact of nitrogen oxide species

dc.contributor.authorDelabie, Annelies
dc.contributor.authorSwerts, Johan
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorJung, Sung-Hoon
dc.contributor.authorRaisanen, Petri
dc.contributor.authorGivens, Michael
dc.contributor.authorShero, Eric
dc.contributor.authorPeeters, Jozef
dc.contributor.authorMachkaoutsan, Vladimir
dc.contributor.authorMaes, Jan
dc.date.accessioned2021-10-19T13:12:45Z
dc.date.available2021-10-19T13:12:45Z
dc.date.issued2011-03
dc.identifier.issn0013-4651
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18825
dc.sourceIIOimport
dc.titleOzone based atomic layer deposition of hafnium oxide and impact of nitrogen oxide species
dc.typeJournal article
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorSwerts, Johan
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorGivens, Michael
dc.contributor.imecauthorMachkaoutsan, Vladimir
dc.contributor.imecauthorMaes, Jan
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.source.peerreviewyes
dc.source.beginpageD259
dc.source.endpageD263
dc.source.journalJournal of the Electrochemical Society
dc.source.issue5
dc.source.volume158
imec.availabilityPublished - imec


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