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Imec CMORE SiGeMEMS technology platform

dc.contributor.authorDonnay, Stephane
dc.date.accessioned2021-10-19T13:18:28Z
dc.date.available2021-10-19T13:18:28Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18852
dc.sourceIIOimport
dc.titleImec CMORE SiGeMEMS technology platform
dc.typeOral presentation
dc.contributor.imecauthorDonnay, Stephane
dc.contributor.orcidimecDonnay, Stephane::0000-0003-2489-4793
dc.source.peerreviewno
dc.source.conferenceInternational Symposium on Integrated Microsystems - ISIM
dc.source.conferencedate10/02/2011
dc.source.conferencelocationTsukuba Japan
dc.identifier.urlhttp://www.mu-sic.tohoku.ac.jp/saisentan/archive/ISIM2011/index.html
imec.availabilityPublished - imec


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