Air gap-based MEMS switch technology using nickel surface micromachining

View/open

22650.pdf (1.942Mb)

Metadata

Show full item record

Authors

Ekkels, Phillip; Rottenberg, Xavier; Czarnecki, Piotr; Philipsen, Harold; Mertens, Robert; Puers, Bob; Tilmans, Harrie

ISSN

0924-4247

Issue

2

Journal

Sensors and Actuators A: Physical

Volume

166

Title

Air gap-based MEMS switch technology using nickel surface micromachining

Publication type

Journal article

Embargo date

9999-12-31

Collections

Articles