Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Articles
Air gap-based MEMS switch technology using nickel surface micromachining
Publication:
Air gap-based MEMS switch technology using nickel surface micromachining
Copy permalink
Date
2011
Journal article
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
22650.pdf
1.94 MB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Ekkels, Phillip
;
Rottenberg, Xavier
;
Czarnecki, Piotr
;
Philipsen, Harold
;
Mertens, Robert
;
Puers, Bob
;
Tilmans, Harrie
Journal
Sensors and Actuators A: Physical
Abstract
Description
Metrics
Views
1884
since deposited on 2021-10-19
1
last month
Acq. date: 2025-12-18
Citations
Metrics
Views
1884
since deposited on 2021-10-19
1
last month
Acq. date: 2025-12-18
Citations